Microelectromechanical systems (MEMS) are tiny devices that integrate various components, such as miniature sensors, electronics and actuators, onto a single chip. These small devices have proved highly promising for precisely detecting biological signals, acceleration, force and other measurements.
Most of the MEMS developed to date are made of silicon and silicon nitride. While some of these devices have achieved promising results, their material composition and design limit their sensitivity and versatility, for instance limiting their use in wet environments.
In a recent Nature Electronics paper, researchers at Ecole Polytechnique Fédérale de Lausanne (EPFL) introduced an innovative cantilever design for MEMS based on a polymer, a semiconductor and ceramic. Cantilevers are tiny flexible beams that can adapt their shape in response to external forces or molecular interactions, thus potentially serving as sensors or actuators.
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